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Optical phased arrays (OPAs) are key enabling elements for solid-state LiDAR (light detection and ranging) and three-dimensional (3-D) imaging without bulk mechanical moving parts [1]. Solid state LiDARs are highly sought after for self-driving cars and autonomous vehicles [2,]. OPA's are also instrumental for free-space communications [3], optical switches [4], and holographic displays [5]. OPAs are capable of sophisticated beamforming such as scanning and simultaneous pointing/tracking of multiple objects. Narrow beam divergence and large field of views (FOVs) are desirable for these applications.more » « less
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Wang, Youmin; Zhou, Guangya; Zhang, Xiaosheng; Yu, Kyoungsik; Wu, Ming C (, Conference on Lasers and Electro-Optics)We present a two-dimensional ultra large aperture optical phase array (OPA) with 160×160 elements enabled with optical microelectromechanical system (MEMS). The random access beamsteering up to 4.4°×4.6° scanning range at 1550nm is demonstrated.more » « less
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Wang, Youmin; Wu, Ming C. (, Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on)Optical phased array (OPA) is a key enabling element for solid state LIDAR (light detection and ranging). In this paper, we demonstrate a novel MEMS micromirror array OPA. Vertical combdrive actuators are integrated underneath the mirrors to achieve a small pitch (2.4μm) and a large field of view (22° at 905nm wavelength and 40° at 1550nm). The OPA has 2μs response time, and 10V actuation voltage.more » « less
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Blanche, Pierre-Alexandre; LaComb, Lloyd; Wang, Youmin; Wu, Ming (, Applied Sciences)
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